What is target?
In PVD, the target material used to provide film coating in the metal.
What is the Technological Principles of PVD ?
In addition, a high potential difference was added between the Target and the wafer. At that time, the Ar of the process gas dissociated into Ar+ under the high difference, and because the Ar+ with positive charge was attracted by the electric field, it crashed into the Target, causing the Target to produce metal grains that fell to the wafer to form film due to the effect of gravity.This process is PVD.
What is PVD process?
PVD is the abbreviation of Physical Vapor Deposition (GA). It refers to that under vacuum conditions, low voltage and large current arc discharge technology is adopted to use gas discharge to vaporize the target material and ionize the evaporated substance and gas. By using the accelerating action of electric field, the evaporated substance and its reaction products are deposited on the workpiece.
What is the metal conductor material in the semiconductor?
Tungsten wire Aluminium wire Copper wire.
What kinds of metal films can be obtained in pvd process?
1.Aluminum (AL), titanium (Ti), TIN and cobalt (Co).
2.General water into the PVD machine, must be coated with Titanium TIN aluminum/titanium/TIN.Five layers of metal.
What is the function of titanium?
Reduce metal contact resistance.
What is the function of Cobalt?
Why in aluminum targets need to add a small amount of copper?
As the current moves through the aluminum layer, the atoms move along the grain interface. Too much cracking can cause wire breakage, which can be prevented by adding a small amount of copper.
Why in PVD target materials need to be cooled?
Avoid excessive surface temperature(The result of evaporation makes the quality of the metal film unstable).
Why does the machine control the purity of cooling water when it is used?
In order to prevent or insulation.
Why does to be heated the process gas line?
Prevent process gas from condensing into liquid and affecting process.
What is the PM?
Its preventive maintenance
Why is machine regular overhauling?
Take corresponding maintenance or replacement measures according to the cycle of the machine, in order to maintain the stability of the machine performance, prevent the process yield decline, prolong the life of the machine and parts.
Why engineer does the overhaul must first cool the heater to an appropriate temperature?
For the safety of engineers and machine.
What is the gas used in PVD processing?
N2 or Ar.
What are the PVD testing items?
Reflectivity,Thickness,Resistancerange, particle, Uniformity.
Machine leak-checking. Why is helium used for it?
1.Helium is low in the atmosphere and avoid a miscarriage.
2.With strong permeability and easy to leak.
3.Helium is Blunt gas inert,Not easy to cause machine contamination or corrosion .
Why do machine used cooling water?
Control temperature, In case the temperature is too high and the machine is damaged.
Rough pump uses dry type rather than oil type,what is reason?
Prevent back flow contamination of oil particles to the machine.
In PVD working, what Use the several vacuum pump?
Rough pump,From atmospheric pressure to 5mTorr. Cory pump,From 5mTorrt to 10E-9Torr
How can high vacuum be achieved in a PVD process?
Use of high vacuum pump.
What is the function of pasting a warning to the top of machine ?
Warn everyone of the danger, such as high temperature, high voltage, Corrosive liquid, etc.
Daily check machine attention?
Generally not out of water, electricity, gas point inspection, in addition to some PM life Time(preventive maintenance cycle) is also important.
What is MFC?
Mass flow controller,Its Used to control the flow rate of the reaction gas.
Test the solvent on the PH strip,What color will acidic and alkaline show ?
Acidicie is red ,Alkaline is blue.
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